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【英文标准名称】:StandardGuideforDepthProfilinginAugerElectronSpectroscopy
【原文标准名称】:俄歇电子能谱学中的深度压形的标准指南
【标准号】:ASTME1127-2008
【标准状态】:现行
【国别】:美国
【发布日期】:2008
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:E42.03
【标准类型】:(Guide)
【标准水平】:()
【中文主题词】:
【英文主题词】:anglelapping;angle-resolvedAES;Augerelectronspectroscopy;ballcratering;compositionaldepthprofiling;crosssectioning;depthprofiling;depthresolution;sputterdepthprofiling;sputtering;thinfilms;Surfaceanalysis--spectrochemicalanalysis
【摘要】:Augerelectronspectroscopyyieldsinformationconcerningthechemicalandphysicalstateofasolidsurfaceinthenearsurfaceregion.Nondestructivedepthprofilingislimitedtothisnearsurfaceregion.Techniquesformeasuringthecraterdepthsandfilmthicknessesaregivenin(1).Ionsputteringisprimarilyusedfordepthsoflessthantheorderof1x03BC;m.Anglelappingormechanicalcrateringisprimarilyusedfordepthsgreaterthantheorderof1x03BC;m.Thechoiceofdepthprofilingmethodsforinvestigatinganinterfacedependsonsurfaceroughness,interfaceroughness,andfilmthickness(2).ThedepthprofileinterfacewidthscanbemeasuredusingalogisticfunctionwhichisdescribedinPracticeE1636.1.1ThisguidecoversproceduresusedfordepthprofilinginAugerelectronspectroscopy.1.2Guidelinesaregivenfordepthprofilingbythefollowing:
Section
IonSputtering
6
AngleLappingandCross-Sectioning
7
MechanicalCratering
8
MeshReplicaMethod
9
NondestructiveDepthProfiling
10